6a. NAME OF PERFORMING ORGANIZATION 6b. OFFICE SYMBOL 7a. NAME OF MONITORING ORGANIZATIO I, I

19. ABSTRACT (Continue on reverse if necessary and identify by block number) This document details a study of the fundamental physical and chemical processes occuring in hot filament and laser assisted synthetic diamond CVD processes. The chemical model developed in this program permits a detailed analysis of previous investigations. This model suggests that several factors will limit the attainable purity and utility of synthetic diamonds grown by plasma or hot filament CVD techniques. A diamond deposition process based upon selective laser production of the chemical species which give rise to the films is described. This technique holds the promise of growing essentially pure diamond at rates comparable to existing schemes, and should permit co-deposition of selected dopant species to make novel new optic and electro-optic devices. An experimental diamond CVD reactor has been designed, developed and tested to provide experimental verification of the model. Tho reirtor h.!; been run In two mode