Co3O4 as Anode Material for Thin Film μBatteries by Remote Plasma Atomic Layer Deposition

During the past decade, portable electronic devices have become considerably more complex and have found many new challenges, especially in miniaturization. To effectively integrate battery technology in these applications, it is essential to produce high quality thin films for all-solid-state batteries. For this reason, conformal thin film deposition techniques, like atomic layer deposition (ALD), are gaining increasingly more interest. Cobalt oxide (Co3O4) can possibly be employed as an anode material in battery applications for the use in innovative concepts like the 3D thin-film lithium-ion battery as proposed by Notten et al (1,2). Compared to commonly used graphite anodes, which have a theoretical capacity of 374 mAh g-1, Co3O4 provides a much highe