IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING

A new concept for a micro pressure sensor is demonstrated. The pressure difference between the inlet and the outlet of glass nanochannels is obtained by measuring the electrokinetically generated electric potential. To demonstrate the proposed concept, experimental investigations are performed for 100 nm wide nanochannels with sodium chloride solutions having various concentrations. The proposed pressure sensor is able to measure the pressure difference within a 10 % deviation from linearity. The sensitivity of the electrokinetic pressure sensor with 10−5 M sodium chloride solution is 18.5 µV Pa−1, which is one order of magnitude higher than that of typical diaphragm-based pressure sensors. A numerical model is presented for investigating the effects of the concentration and the channel width on the sensitivity of the electrokinetic pressure sensor. Numerical results show that the sensitivity increases as the concentration decreases and the channel width increases. (Some figures in this article are in colour only in the electronic version) Nomenclature p pressure difference (Pa