Modeling a Novel MEMS Gyroscope

Different designs of Thermal MEMS gyroscope are presented and compared through the use of the Comsol Multiphysics software package. Previously designed Thermal MEMS gyroscopes show some limitations such as being vulnerable to gravity force. Finding a technique to increase the range of thermal MEMS gyroscope reliability motivated us to come up with a new design that we refer to as the `Forced Convection MEMS gyroscope’. An external force has been introduced to the system to create a higher-velocity hot gas stream that will be deviated more in response to rotation. The external force should be great enough that convection currents resulting from gravity or acceleration will have minimal impact on the gyroscope sensitivity. A heating element can still be used, but its primary purpose is now to warm the flowing gas so that it can be detected by the sensors