Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I - General Principles and New Measurement Techniques

Friction force measurements using modified atomic force microscopy, called here Friction Force Microscopy (FFM), are becoming increasingly important in the understanding of fundamental mechanisms of friction, wear, and lubrication, and to study interfacial phenomenon in micro- and nanostructures used in magnetic storage systems and a.u Microelectromechanical Systems (MEMS). A review of existing designs of FFMs and methods of friction force measurements is presented. In terms of friction force measurements, there are- " important issues related to the basic operation and calibration of these instruments which have not been fully studied. A new method of measuring friction force using a commercial FFM f it and a calibration procedure for conversion of measured data to normal and friction forces are a presented. Atomic-scale friction data of selected materials are presented and discussed in light of macro-friction measurements. J j 93-18784 • ~IIhIIilII l