D Q Mechanical Properties of Microelectronics Thin Films: Silicon Nitride (Si 3N4)

S....) Mechanical design of microfabricated devices requires knowledge of mechanical material properties. Thin film material properties are sensitively process dependent, and should therefore be organized accordingly. A relational database of material properties is under development as part of a general micro-electro-mechanical-EAD environment. A computerized literature search through the published values for Silicon Nitride (Si3N") properties under various processing conditions resulted in the following document. /