A fully integrated magnetically actuated micromachined relay

Abstract—A fully integrated magnetically actuated microma-chined relay has been successfully fabricated and tested. This particular device uses a single-layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW. Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 850 000 operations have been observed. Contact resistances as low as 22.4 m have been observed under electromagnetic actuation. Magnetic and structural finite-element (FE) simulations have been performed using ANSYS to calculate both the actuation and contact forces. [288] Index Terms—Electromagnetic, magnetic, micromachined, re-lay, switch