iesis Supervisor

We report here new and further developments into the MicroBearing device for the MIT Microengine Program. The all-silicon device consist of a free-rotating microturbine, with 4.2 mm rotor diameter, enclosed within a five wafer fusion-bonded stack. Of note are the low aspect ratio journal bearing and large journal bearing clearances, primarily limited by microfabrication, from which stable bearing operation must first be demonstrated as vi-able. Theoretical modeling of the gas-lubricated hydrostatic journal bearing presents design charts, a comparative study of existing predictions and investigation into rotational effects to consider the bearing stiffness during operation. Continued experimental refinements and exploration with our microfabricated rotor achieved rotational speeds up to 1.4 million rpm and peripheral speeds in excess of 300 m/s. Extensive experimental data is presented with analysis, focusing on whirl motion and its harmonic resonances as candidates for instability