Microplasma Device Utilizing SU-8 Photoresist as a Barrier Rib

a barrier rib has been fabricated and characterized operating in the abnormal mode for neon pressures from 300 to 800 torr and having a hexagonal structure, 5 × 5 arrays of microplasma. The microplasma device, which has a simple fabrication process, offers advantages such as low firing voltage, low cost, and stable glow discharge. The electrical properties have been examined by bipo-lar voltage waveforms with different frequencies. The geometric patterns of the barrier rib can be simply changed by lithographic techniques. Index Terms—Microdischarge. MUCH OF THE interest in microplasma devices stemsfrom generating efficient vacuum ultraviolet to visible radiation. There are many valuable applications such as liquid crystal display backlighting, plasma display panels, environ-mental sensors, and lighting systems. Unfortunately, current microplasma devices have revealed that dimensional contro