∗Qualcomm Incorporated

Abstract—This paper presents a high-Q tunable evanescent-mode cavity filter using capacitive RF MEMS cantilever switches with a frequency coverage of 5.5-4.3 GHz. The filter results in an insertion loss of 2.6-5.3 dB over the tuning range and a 3-dB bandwidth of 55-40 MHz (fractional bandwidth of %1). The measured Qu of the filter is 511-273 over the frequency range, which is to our knowledge, the best report Q using RF-MEMS technology. Index Terms—evanescent-mode, RF MEMS, Capacitive can-tilever switch, high-Q tunable filter, waveguide filter. I