Physical and statistical analysis of functional process variables for process control in semiconductor manufacturin
SIGLEAvailable from British Library Document Supply Centre- DSC:D73549/87 / BLDSC - British Library ...
In today's semiconductor market, manufacturers face a daunting challenge. Product concepts evol...
The object of the investigation is the operations of statistical control and regulation of processes...
The research aims at modeling and analyzing the interactions among functional process variables (FPV...
A practical guide to semiconductor manufacturing from process control to yield modeling and experime...
6.780 Semiconductor Manufacturing, a course through MIT's OpenCourseWare, examines statistical model...
[[abstract]]Quality has become a key determinant of success in all aspects of modern industries. It ...
Process monitoring of output variables affecting final performance have been mainly executed in semi...
[[abstract]]Recently, product yield has become an important index for evaluating semiconductor indus...
Due to the character of the original source materials and the nature of batch digitization, quality ...
textSemiconductor manufacturing is characterized by a dynamic, varying environment and the technolog...
The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and...
Variability is the greatest enemy of a manufacturing system, which causes unstable performances and ...
Implementing Computer Integrated Manufacturing (CIM) systems in semiconductor manufacturing can lea...
Future generations of semiconductor devices require lower tolerances in manufacturing and, therefore...
SIGLEAvailable from British Library Document Supply Centre- DSC:D73549/87 / BLDSC - British Library ...
In today's semiconductor market, manufacturers face a daunting challenge. Product concepts evol...
The object of the investigation is the operations of statistical control and regulation of processes...
The research aims at modeling and analyzing the interactions among functional process variables (FPV...
A practical guide to semiconductor manufacturing from process control to yield modeling and experime...
6.780 Semiconductor Manufacturing, a course through MIT's OpenCourseWare, examines statistical model...
[[abstract]]Quality has become a key determinant of success in all aspects of modern industries. It ...
Process monitoring of output variables affecting final performance have been mainly executed in semi...
[[abstract]]Recently, product yield has become an important index for evaluating semiconductor indus...
Due to the character of the original source materials and the nature of batch digitization, quality ...
textSemiconductor manufacturing is characterized by a dynamic, varying environment and the technolog...
The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and...
Variability is the greatest enemy of a manufacturing system, which causes unstable performances and ...
Implementing Computer Integrated Manufacturing (CIM) systems in semiconductor manufacturing can lea...
Future generations of semiconductor devices require lower tolerances in manufacturing and, therefore...
SIGLEAvailable from British Library Document Supply Centre- DSC:D73549/87 / BLDSC - British Library ...
In today's semiconductor market, manufacturers face a daunting challenge. Product concepts evol...
The object of the investigation is the operations of statistical control and regulation of processes...