Add to ORKGAbstract—An overview is provided of materials and processes research currently being conducted in support of MEMS device design at MIT. Underpinning research is being conducted in five areas: room temperature strength characterization, elevated temperature strength characterization, processing of Si/SiC hybrid structures, modeling of wafer bonding processes and development of high temperature fluid interconnections. Emphasis is placed on the key areas of materials science and engineering
This talk aims to show the possibilities to build up micro electromechanical systems (MEMS) in a sma...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
T he present Annual Report describes the research activitiescarried out at the MDM Laboratory, also ...
An overview is provided of materials and processes research currently being conducted in support of ...
Microelectromechanical systems (MEMS) is a rapidly growing field with numerous current and potential...
In recent years, microelectromechanical systems (MEMS) have successfully acceded to several markets,...
Microelectromechanical systems (MEMS) have recently become an important area of technology, building...
Over the past 7 years there has been an explosion of research activity into materials for MicroElect...
Due to its desirable material properties, Silicon Carbide (SiC) hasbecome an alternative material to...
The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 1999.In...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
In this article materials issues that arise during the processing and operation of micro-electro mec...
Two major research areas pertinent to microelectromechanical systems (MEMS) materials and material s...
In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on...
This talk aims to show the possibilities to build up micro electromechanical systems (MEMS) in a sma...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
T he present Annual Report describes the research activitiescarried out at the MDM Laboratory, also ...
An overview is provided of materials and processes research currently being conducted in support of ...
Microelectromechanical systems (MEMS) is a rapidly growing field with numerous current and potential...
In recent years, microelectromechanical systems (MEMS) have successfully acceded to several markets,...
Microelectromechanical systems (MEMS) have recently become an important area of technology, building...
Over the past 7 years there has been an explosion of research activity into materials for MicroElect...
Due to its desirable material properties, Silicon Carbide (SiC) hasbecome an alternative material to...
The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 1999.In...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
In this article materials issues that arise during the processing and operation of micro-electro mec...
Two major research areas pertinent to microelectromechanical systems (MEMS) materials and material s...
In this thesis, novel Silicon-based MEMS actuator structures are presented, together with a study on...
This talk aims to show the possibilities to build up micro electromechanical systems (MEMS) in a sma...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
T he present Annual Report describes the research activitiescarried out at the MDM Laboratory, also ...