Tunable Erbium Doped Fiber Laser Using a Silicon Micro-Electro-Mechanical Fabry-Perot Cavity

We propose a novel tunable erbium doped fiber laser using a silicon micro-electro-mechanical (MEM) Fabry-Perot cavity. The cavity is made of two Bragg mirrors, one being actuated by comb drives. The MEM Fabry-Perot cavity and grooves for optical fibers are fabricated by DRIE on a 70 µm SOI wafer and integrated in a ring fiber laser configuration. The fiber laser has a tuning range of 7.7 nm in the C-band and a spectral width of 0.1 nm