Add to ORKGAbstract ⎯ MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept
AbstractThis paper presents original designs of micro-fluidic sensors. Targeted applications are pH-...
As the demand for cooling is increased for high-density powered electronic devices, researchers have...
International audienceThis paper presents original designs of micro-fluidic sensors. Targeted applic...
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspend...
MEMS fluidic devices often require the integration of transducer structures with freely suspended mi...
Many microfluidic devices are made using specialized fabrication processes, limiting the ability to ...
Microfluidic devices often require channels of a specific size and shape. These devices are then mad...
MUMPs (Multi-User MEMS Process) based microchannels made of either glass or polysilicon have been su...
Bogunovic L, Vosskötter C, Anselmetti D. Fabrication of a microfluidic channel with differently modi...
This paper presents the design and fabrication of a microfluidic structure on a glass substrate for ...
In the field of MEMS technology, the high accumulation and high density for making semiconductor dev...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by co...
This paper describes the development of polyimide-based microfluidic devices. A layer transfer and l...
This thesis describes an approach that is particularly useful for prototyping new devices and system...
AbstractThis paper presents original designs of micro-fluidic sensors. Targeted applications are pH-...
As the demand for cooling is increased for high-density powered electronic devices, researchers have...
International audienceThis paper presents original designs of micro-fluidic sensors. Targeted applic...
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspend...
MEMS fluidic devices often require the integration of transducer structures with freely suspended mi...
Many microfluidic devices are made using specialized fabrication processes, limiting the ability to ...
Microfluidic devices often require channels of a specific size and shape. These devices are then mad...
MUMPs (Multi-User MEMS Process) based microchannels made of either glass or polysilicon have been su...
Bogunovic L, Vosskötter C, Anselmetti D. Fabrication of a microfluidic channel with differently modi...
This paper presents the design and fabrication of a microfluidic structure on a glass substrate for ...
In the field of MEMS technology, the high accumulation and high density for making semiconductor dev...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂...
A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by co...
This paper describes the development of polyimide-based microfluidic devices. A layer transfer and l...
This thesis describes an approach that is particularly useful for prototyping new devices and system...
AbstractThis paper presents original designs of micro-fluidic sensors. Targeted applications are pH-...
As the demand for cooling is increased for high-density powered electronic devices, researchers have...
International audienceThis paper presents original designs of micro-fluidic sensors. Targeted applic...