Thin films of LiCoO2 are obtained by Laser ablation from sintered LiCoO2 targets. The films were deposited on stainless steel or tantalum foil substrates so they could be used as cathodes in rechargeable thin-film lithium batteries. The films are amorphous when deposited on unheated substrates, but crystallize readily when heated in air above 500 ~ Using x-ray diffraction, we show that the films are basically stoichiometric and have no impurity phases present. They consist partly of the normal bulk LiCoO2 phase which can be prepared by reacting Li2CO3 and CoCO ~ at 850 ~ However, the films also contain some of the new, low temperature LiCoO2 phase recently reported by Gummow et al. In order to understand our films better we have synthesized...