Three-axis teslameter with integrated Hall probe

Abstract—The first commercially available teslameter with a fully integrated three-axis Hall probe is described. The Hall probe chip contains horizontal and vertical Hall elements, analog elec-tronics, and a synchronization circuit. A horizontal Hall element measures the perpendicular component, and two vertical Hall devices measure the two in-plane components of a magnetic flux density vector. Current spinning in the Hall devices cancels offset, 1/f noise, and the planar Hall voltage. The analog electronic mod-ule of the teslameter cancels the residual offset and compensates temperature dependence and nonlinearity of the Hall voltages. The digital module provides analog-to-digital conversion and com-munication to a computer. Index Terms—Gaussmeter, Hall probe, magnetic measurement, planar Hall effect, teslameter, three-axis Hall. I