Recommended Citation Cho, Youngnam, "Stabilization of Rutile-related Thin Film on TiO2 Substrates " (2002). Electronic Theses and Dissertations. Paper 243. STABILIZATION OF RUTILE-RELATED THIN FILM ON TiOz SUBSTRATES BY

Conducting metal oxide thin films are of broad interest because they have a wide variety of magnetic and electronic properties. Materials exist that range from superconducting to insulating, are ferromagnetic and are ferroelectric. These properties make thin conducting oxide films attractive for many industrial applications. A class of metal oxides exists that adapt the rutile crystal structure; the structure of the mineral rutile, TiO2. These metal oxides have the general formula MO2 where M is a metal cation of valence +4. Metal oxides crystallizing in the rutile structure also display a wide variety of physical properties. The objective of this research was to examine the ability of single crystal rutile (TiO2) substrates to stabilize various isostructural M02 compounds prepared by chemical vapor deposition (CVD). This included metastable and unusual valence state metal oxide compounds. The materials examined in this thesis included CrO2 and RuO2