Recommended Citation Zhao, Yue, "Low-Photoluminescence Hollow Waveguide Platforms for High-sensitivity Integrated Optical Sensors " (2012). All Theses and Dissertations. Paper 2978. Low-Photoluminescence Hollow Waveguide Platforms for High-Sensitivity Int

This dissertation presents research on the fabrication of optofluidic sensor platforms, which consist of integrated hollow waveguides and solid waveguides. Antiresonant reflecting optical waveguides (ARROWs) filled with liquids or gases, can be used for high-sensitivity sensing in applications of biotechnology, chemical synthesis, and analytical chemistry. The fabrication method developed for integrated ARROW sensing platforms utilizes standard microfabrication processes and materials. Dielectric cladding layers are deposited on a silicon wafer using plasma-enhanced chemical vapor deposition (PECVD) or sputtering. A sacrificial material is then patterned over the bottom cladding layers by photolithography. Additiona