A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication

Abstract This paper presents a novel exural-based nano-positioning actuator that has a positioning accuracy of 10 nm (limited by encoder resolution) throughout a range of 3 mm. A new dual-magnet conguration is introduced to enhance this electromagnetically driven actuator in achieving 60 N/Amp in a compact conguration. In addition, a constant and evenly distributed magnetic ux density is obtained throughout 11 mm of air gap. A new mathematical model is presented to accurately predict the behavior of magnetic eld within the effective air gap of this conguration. Complete analytical models for this actuator's electromagnetic drive and exural-bearing support element are presented. Lastly, a prototype of this actuator is developed for validating the established analytical models and verifying the claimed capabilities. I