NOVEL 3D FORCE SENSOR USING ULTRA-THIN SILICON STRAIN GAUGE BONDED ON METAL MEMBRANE

In the present paper, we propose a novel 3D force sensor design using a silicon strain gauge bonded on a metal diaphragm. The fabrication process and glass frit bonding process of the ultra-thin silicon strain gauges having a thickness of 50 μm were established; afterward, performance of the silicon strain gauge bonded on the stainless steel cantilever beam was evaluated at the various conditions. In results, resistance linearly increased with deformation by tensile stress, and gauge factor representing the sensitivity of the strain gauge was 33.77. Nonlinearity and hysteresis were respectively 0.21%FS and 0.17%FS