Section Manufacturing of materials DEPOSITION OF DIAMOND-LIKE CARBON COATINGS BY UNBALANCED MAGNETRON SPUTTERING.

Amorphous hydrogenated carbon films contammg a small amount of metal (Me-C:H) have been deposited by closed field unbalanced magnetron sputtering. The films have graded compositions to optimise the adhesion to the substrates. Multilayer TiC/Ti-C:H films have also been deposited. The films have excellent properties: high microhardness (more than 2000 Hv), excellent adhesion to tool steel (a critical load of 100 N in the scratchtest) and a coefficient of friction against bearingsteel of about 0.1. The coating procedure, for in generally metals, is ideally suited to the system used. The graded film preparation is important for the intrinsic stress. The rather low deposition temperatur