MOCVD of superconducting oxides, heterostructures and superlattices

Abstract: Superconducting YBa,Cu,O, thin films have been grown by Injection MOCVD on different kind of monocristalline substrates: MgO, NdGaO,, LaAlO, with critical current densities Jc(77K) over 106A/cm2 on all of these substrates and up to 7.106A/cm2 on LaAlO,. Heterostructures have been grown on metallic substrates with convenient YSZ buffer. Biaxially textured YBCO films have been realized with Jc(77K) = 5.10SA/cm2. Other heterostructures with an active dielectric SrTiO, layer have been grown for tunable microwave devices applications with promising properties. Finally Injection MOCVD has shown to be well adapted for the formation of multilayers and superlattices with a control of the layer thickness in the range of one unit cell. YBa,Cu,0,.~PrBazCu,0,.6 superlattices have been grown with anisotropic superconducting properties which can be tailored by changing the layer thickness of both superconducting and insulating layer. 1