, T. Heuser a

Surface Acoustic Wave (SAW) filters are key components for mobile communication. In SAW devices mechanical waves propagate on the surface of a piezoelectric bulk material such as LiNbO3 or LiTaO3. SAW components require advanced cavity packaging solutions in order to enable the mechanical wave propagation on the substrate material. Size reduction of SAW filters allows further miniaturization of mobile phones and an extension of their functionality. The mobile communication industry, therefore, demands advanced cavity package technologies to be developed for SAW components. These packages have to offer high performance, high reliability, and low cost while maintaining a form factor as small as possible. To address these requirements EPCOS has developed a Die Sized SAW Package (DSSP), a true chip-size wafer level package for SAW filters. This paper discusses the manufacturing process of wafer-level-packages for SAW-devices with a special focus on the adhesive wafer bonding technology