Grain-Size-Dependent Diamond-Nondiamond Composite Films: Characterization and Field-Emission Properties

ABSTRACT Diamond films with grain sizes in the range of 5-1000 nm and grain boundaries containing nondiamond carbon are depositedonasiliconsubstratebyvaryingthedepositionparameters.Theoverallmorphologiesoftheas-depositeddiamond-nondiamond composite films are examined by scanning electron microscopy and atomic force microscopy, which show a decrease in the surface roughness with a decrease in the diamond grain size. Although the Raman spectra show predominately nondiamond carbon features in the diamond films with smaller grain sizes, glancing-angle X-ray diffraction spectra show the absence of graphitic carbon features and the presence of very small amorphous carbon diffraction features. The CH4 percentage (%) in Ar and H2 plasma during deposition plays a crucial role in the formation of diamond films with different grain sizes and nondiamond carbon contents, which, in turn, determines the field-emission behavior of the corresponding diamond films. The smaller the grain size of the diamond, the lower is the turn-on field for electron emission. A lower turn-on field is obtained from the diamond films deposited with 2-5 % CH4 than from the films deposited with either 1 % or 7.5 % CH4 in the Ar medium. A current density greater than 1 mA/cm2 (at 50 V/µm) is obtained from diamond films deposited with a higher percentage of CH4. A model is suggested for the field-emission mechanism from the diamond-nondiamond composite films with different diamond grain sizes and nondiamond contents