Design and Implementation of Capacitive Micromachined Ultrasonic Transducers

Abstract—Capacitive micromachined ultrasonic transducers (CMUTs) have a strong potential to compete piezoelectric trans-ducers in high power applications. In a CMUT, obtaining high port pressure competes with high particle velocity: a small gap is required for high electrostatic force while particle displacement is limited by the gap height. On the other hand, it is shown in [1] that CMUT array exhibits radiation impedance maxima over a relatively narrow frequency band. In this paper, we describe a design approach in which CMUT array elements resonate at the frequency of maximum impedance and have gap heights such that the generated electrostatic force in uncollapsed mode, can sustain particle displacement peak amplitude up to the gap height. The CMUT parameters are optimized for around 3 MHz of operation, using both a SPICE model and FEM. The optimized parameters require a thick membrane and low gap heights to get maximu