Dynamics of a close-loop controlled MEMS resonator

Abstract The dynamics of a close-loop electrostatic MEMS resonator, proposed as a platform for ultra sensitive mass sensors, is investigated. The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions. Bifurca-tion diagrams of the resonator response are obtained at five different actuation voltage levels. The resonator exhibits bi-stability with two coexisting stable equilib-rium points located inside a lower and an upper poten-tial wells. Steady-state chaotic attractors develop in