Figure 1. Microfabrication steps for producing cMUTs Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers

In this paper, capacitive micromachined ultrasonic trans-ducers are fabricated using a sacrificial surface micro-machining process. A testing procedure has been estab-lished in order to measure the absolute transmit and re-ceive sensitivity spectra of the fabricated devices. The ex-periments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers