Add to ORKGWe describe a self-referencing method of wavefront sensing based on rotated lateral shearing interferometry which is able to measure the local slope of a wavefront. We describe the principle of operation, suggest a number of practical implementations, and present exper-imental results. We found the difference between two sequential measurements of a nominally flat wavefront to be better than k/250 root mean square.! 2007 Elsevier B.V. All rights reserved. 1
This paper provides an overview of wavefront sensing technologies. A brief background to the field o...
A vectorial shearing interferometer with variable sensitivity based in the rotation of a pair of wed...
We present a lateral shearing interferometer suitable for high-NA EUV wavefront metrology. In this i...
We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their ...
The operation of a grating lateral shear heterodyne interferometer as a wavefront sensor for atmosph...
A new lateral shearing interferometer is proposed for precision surface measurement. In this shearin...
The wavefront reconstruction method for shearing interferometry using difference Zernike polynomial ...
We present a wavefront reversal technique to produce a dual-field fringe pattern for self-referencin...
This dissertation develops and presents an existing but little known method to provide an exact solu...
Vectorial shearing interferometer has been used to measure small and large non-rotationally symmetri...
<p> Quadri-wave lateral shearing interferometry(QWLSI) is a new and powerful technique for wave-fro...
Vectorial Shearing Interferometer is able to select variable shear and tilt along any wavefront dire...
PURPOSE:A novel wavefront sensor has been developed. It follows the same principle of the Shack-Hart...
Currently there are many interferometers used for testing wavefront, measuring the quality of optica...
A system aimed at real—time wavefront analysis at the focus of an astronomical telescope has been de...
This paper provides an overview of wavefront sensing technologies. A brief background to the field o...
A vectorial shearing interferometer with variable sensitivity based in the rotation of a pair of wed...
We present a lateral shearing interferometer suitable for high-NA EUV wavefront metrology. In this i...
We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their ...
The operation of a grating lateral shear heterodyne interferometer as a wavefront sensor for atmosph...
A new lateral shearing interferometer is proposed for precision surface measurement. In this shearin...
The wavefront reconstruction method for shearing interferometry using difference Zernike polynomial ...
We present a wavefront reversal technique to produce a dual-field fringe pattern for self-referencin...
This dissertation develops and presents an existing but little known method to provide an exact solu...
Vectorial shearing interferometer has been used to measure small and large non-rotationally symmetri...
<p> Quadri-wave lateral shearing interferometry(QWLSI) is a new and powerful technique for wave-fro...
Vectorial Shearing Interferometer is able to select variable shear and tilt along any wavefront dire...
PURPOSE:A novel wavefront sensor has been developed. It follows the same principle of the Shack-Hart...
Currently there are many interferometers used for testing wavefront, measuring the quality of optica...
A system aimed at real—time wavefront analysis at the focus of an astronomical telescope has been de...
This paper provides an overview of wavefront sensing technologies. A brief background to the field o...
A vectorial shearing interferometer with variable sensitivity based in the rotation of a pair of wed...
We present a lateral shearing interferometer suitable for high-NA EUV wavefront metrology. In this i...