fabrication, and visual servo control of an XY parallel micromanipulator with piezo-actuation

Abstract—This paper presents a complete design and develop-ment procedure of a new XY micromanipulator for two-dimen-sional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple struc-ture, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathemat-ical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control em-ploying a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size o