Adjustment of electron temperature in ECR microwave plasma

In glow discharge plasma used for processing of materials, the electron temperature affects directly reactive species determining results of plasma processing of materials. In this paper, the experiment results of adjustment of electron temperature (Te) in an Electron Cyclotron Resonance (ECR) device in H2 and H2+CH4 plasmas are given by two methods. One method to adjust Te is the grid method, by installing a floated or biased grid in the plasma; the Te can be increased or decreased. Another method is noble gases doped into the discharge gases; increasing noble gas concentration can decrease Te in a certain scale. The changes of species in plasma are inspected by the optical emission spectroscope and mass spectroscope when Te is dropped