Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

Abstract—A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 µm out of plane and 34 µm in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs. [2010-0201] Index Terms—Beam steering, comb drive, endoscopic imaging, micro-electromechanical systems (MEMS) stage, microlens array (MLA). I