Selective quantum-well intermixing in GaAs–AlGaAs structures using impurities-free vacancy diffusion

dielectric caps to induce selective quantum-well (QW) intermixing in the GaAs–AlGaAs system is studied. The intermixing rate of IFVD was found to be higher in n-i-p and intrinsic than in p-i-n structures, which suggests that the diffusion of the Group III vacancy is not supported in p-type material. Single-mode waveguides have been fabricated from both as-grown and bandgap-tuned double-quantum-well (DQW) laser samples. Propagation losses as low as 8.5 dBcm1 were measured from the bandgap-tuned waveguides at the lasing wavelength of the undisordered material, i.e., 860 nm. Simulation was also carried out to study the contribution of free-carrier absorption from the cladding layers, and the leakage loss induced by the heavily p-doped GaAs contact layer. It was found that the leakage loss contributed by the GaAs cap layer is significant and increases with wavelength