Add to ORKGA source of soft X-ray emission based on the miniature 15 kJ(9È14Ó) plasma focus was developed and tested. The X-ray emission was channelled along the chamber axis through an opening in the inner electrode (anode). A regime with a mean output of more than 100 J per discharge was found. At a discharge current of 280 kA and repetition rate of 3.5Hz achieved by the device, its lifetime was estimated to be 107 commutations (about a year of continuous operation). A demonstration experiment on irradiation of an X-ray resist is discussed. 1
A sort of pulsed microfocus x-ray source has been theoretically and experimentally studied. The port...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
Basic operational characteristics of the plasma focus are considered from design perspectives to dev...
This thesis reports investigations of soft x-ray emission from a compact plasma focus. Experiments w...
Abstract—Basic operational characteristics of the plasma focus are considered from design perspectiv...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and...
Plasma focus devices employing gases Z > 2 are capable to produce a small volume of plasma, less tha...
Plasmafocus devices producing small volume of plasma with electron density n sub e about 10 high 20 ...
A new electrode system is designed and implemented for the NX2 device, a low energy plasma focus, at...
The development of an extremely soft x-ray generator with a tungsten-target tube and its application...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
Plasma focus devices are capable of producing dense high Z plasmas with a lifetime of about 10 ns by...
The main aim of this project was to develop soft x-ray point sources of sufficient power for applica...
A sort of pulsed microfocus x-ray source has been theoretically and experimentally studied. The port...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
Basic operational characteristics of the plasma focus are considered from design perspectives to dev...
This thesis reports investigations of soft x-ray emission from a compact plasma focus. Experiments w...
Abstract—Basic operational characteristics of the plasma focus are considered from design perspectiv...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and...
Plasma focus devices employing gases Z > 2 are capable to produce a small volume of plasma, less tha...
Plasmafocus devices producing small volume of plasma with electron density n sub e about 10 high 20 ...
A new electrode system is designed and implemented for the NX2 device, a low energy plasma focus, at...
The development of an extremely soft x-ray generator with a tungsten-target tube and its application...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
Plasma focus devices are capable of producing dense high Z plasmas with a lifetime of about 10 ns by...
The main aim of this project was to develop soft x-ray point sources of sufficient power for applica...
A sort of pulsed microfocus x-ray source has been theoretically and experimentally studied. The port...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...