Chapter X Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems

The outstanding properties of carbon nanotubes (CNTs) make them a compelling material for use in applications including nanoscale circuits, flexible conductors, battery electrodes, and reinforced composites; and their combination of attractive mechanical, thermal and electrical properties makes CNTs truly unique. However, as with any new material, practical use of CNTs requires efficient and scalable processing methods, and commercial development requires these methods to be compatible with existing manufacturing platforms such as semiconductor processing. This chapter presents a thorough review of methods for integrating CNTs in micro- and nano- devices and systems, focusing on challenges of: controlling CNT size and structure; precisely placing and packing CNTs; and achieving device-compatible growth and processing methods. Examples are selected across the spectrum from early-stage research to present commercialization. Overall, while we are far from meeting the aforementioned challenges, near-term uses of CNTs will include interconnects, non-volatile memory, inertial sensors, and thermal interfaces. 1. The promises and challenges of carbon nanotubes As seamless cylinders of carbon atoms arranged in a hexagonal lattice, carbon nanotube