Modeling and characterization of soft magnetic film actuated 2-D scanners

Abstract—Magnetic behavior of polymer-based scanners is stud-ied in detail with emphasis on a new magnetic actuator model and dc deflection experiments. A 30-µm-thick permalloy sheet is plated on a polymer cantilever scanner and actuated using an external coil. Mechanical and magnetic modeling of the device and exper-imental results are presented. Shape anisotropy of the thin, soft magnetic film is explored for push and pull operation in different configurations. A new magnetic actuator model is developed based on the distributed point-by-point calculation of the magnetostatic moments and forces across the film surface. This effort helps one to obtain generic equations for magnetic force and torque without limiting the use of the model to the case where magnetic material is assumed to be fully saturated. Two-dimensional (2-D) scanning utilizing the orthogonal modes of the scanner, using only one actu-ation coil is presented. Index Terms—Magnetic actuators, magnetic torque, optical scanning, permalloy, scanner. I