Mechanical Engineering by

iAbstract The goal of this thesis is create a scanning probe microscopy (SPM) platform for multifunctional probe-based applications, such as interrogation, manipulation, and fabrication of objects and matter at the micro to nano-scale. The SPM platform uses a newly designed and fabricated electro-thermo-mechanical (ETM) cantilever with a microgripper at its distal end designed for automated pickup and release of tool tips. This unique platform will help address the critical issues of throughput, re-peatability, scalability, and limited functionality of probe-based applications including multi-process nanofabrication. The design, fabrication, and characterization of the custom-made atomic force microscopy (AFM) system, a type of SPM, and the ETM microgripper for multifunctional probe-based applications are presented. The finite element method is used to design the first two vibration modes of the ETM microgrip-per to align with traditional AFM cantilevers. An electro-thermo-mechanical model is used to predict the response of the ETM microgripper. The custom-made AFM system and ETM microgripper are characterized, where experimental results demon