Environmentally robust MEMS vibratory gyroscopes for automotive applications

Abstract—Automotive applications are known to impose quite harsh environmental conditions such as vibration, shock, tempera-ture, and thermal cycling on inertial sensors. Micromachined gyro-scopes are known to be especially challenging to develop and com-mercialize due to high sensitivity of their dynamic response to fab-rication and environmental variations. Meeting performance spec-ifications in the demanding automotive environment with low-cost and high-yield devices requires a very robust microelectromechan-ical systems (MEMS) sensing element. This paper reviews the de-sign trend in structural implementations that provides inherent robustness against structural and environmental parameter vari-ations at the sensing element level. The fundamental approach is based on obtaining a gain and phase stable region in the frequency response of the sense-mode dynamical system in order to achieve overall system robustness. Operating in the stable sense frequency region provides improved bias stability, temperature stability, and immunity to environmental and fabrication variations. Index Terms—Automotive sensors, inertial sensors, microelec-tromechanical systems (MEMS), micromachined gyroscopes. I