Add to ORKGAbstract––This work presents the first implementation of phononic crystals (PnCs) in a standard CMOS process to real-ize high-Q RF MEMS resonators at GHz frequencies without the need for any post-processing or packaging. An unreleased acoustic resonant cavity is defined using a PnC comprising back-end of line (BEOL) materials such as routing metals and low-k intermetal dielectric. A CMOS-MEMS resonant body transistor (RBT) with electrostatic driving and piezoresistive sensing is implemented within this cavity. This results in a 10× enhancement in Q at resonance and improved suppression of spurious modes off-resonance as compared to first-generation CMOS-integrated devices. The first PnC-confined RBT is demonstrated in IBM’s 32nm SOI process...
With quality factors (Q) often exceeding 10,000, vibrating micromechanical resonators have emerged a...
This work is focused on the application of Phononic Crystals to reduce anchor losses of MEMS contour...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.Cataloge...
Abstract — Resonant body transistors (RBTs) are solid state, actively sensed microelectromechanical ...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Comp...
Abstract — This paper presents unreleased CMOS-integrated MEMS resonators fabricated at the transist...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Comp...
Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a ma...
Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a ma...
With the emergence of 5G/mm-Wave communication, there is a growing need for novel front-end electrom...
Vibrating RF MEMS resonators have emerged as a potential solution for implementing monolithically in...
This work presents Si-based electromechanical resonators fabricated at the transistor level of a sta...
Abstract- This work presents Si-based electromechanical resonators fabricated at the transistor leve...
This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VH...
© 2009 American Institute of Physics. The electronic version of this article is the complete one and...
With quality factors (Q) often exceeding 10,000, vibrating micromechanical resonators have emerged a...
This work is focused on the application of Phononic Crystals to reduce anchor losses of MEMS contour...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.Cataloge...
Abstract — Resonant body transistors (RBTs) are solid state, actively sensed microelectromechanical ...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Comp...
Abstract — This paper presents unreleased CMOS-integrated MEMS resonators fabricated at the transist...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Comp...
Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a ma...
Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a ma...
With the emergence of 5G/mm-Wave communication, there is a growing need for novel front-end electrom...
Vibrating RF MEMS resonators have emerged as a potential solution for implementing monolithically in...
This work presents Si-based electromechanical resonators fabricated at the transistor level of a sta...
Abstract- This work presents Si-based electromechanical resonators fabricated at the transistor leve...
This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VH...
© 2009 American Institute of Physics. The electronic version of this article is the complete one and...
With quality factors (Q) often exceeding 10,000, vibrating micromechanical resonators have emerged a...
This work is focused on the application of Phononic Crystals to reduce anchor losses of MEMS contour...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.Cataloge...