bS Supporting Information Self-assembly of organic materials has become an essentialprocess in the fabrication of nanostructures, with particular application to pattern generation for next-generation nanoscale lithography. The microelectronics industry is facing challenges arising from the increasing cost and limited resolution of deep-UV optical lithography, and it is expected that bottom-up approaches using organic molecules will provide a strategy for next-generation nanolithography. Directed self-assembly (DSA) based on polymers or nanoparticles promises very high resolution and outstanding manufacturability of sub-20-nm structures.114 In particular, DSA of block copolymers (BCPs) has shown great advantages such as feature sizes below∼1...
Nanostructures generated from block copolymer self-assembly enable a variety of potential technologi...
Block copolymers (BCPs) self-assemble into periodic arrays of lamella, cylinders, spheres and gyroid...
Self-assembly approaches, e.g. colloidal, emulsion and polymer phase separation, provide scientists ...
Directed self-assembly of block copolymers, based on microphase separation, is a promising strategy ...
Block copolymers (BCP) are self-assembling polymeric materials that have been extensively investigat...
The manufacture of smaller, faster, more efficient microelectronic components is a major scientific ...
Over the course of the past 80 years, semiconductor devices have become increasingly ubiquitous in e...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineeri...
he directed self-assembly (DSA) of block copolymers (BCPs) is receiving growing attention from integ...
The use of polymers in microelectronics and photonics is continuously developing along two main stre...
Directed self-assembly of block copolymers has received a great deal of research attention as a prom...
Directed Self-Assembly (DSA) is a promising strategy for quickly and cheaply manufacturing nanoscale...
The thin-film directed self-assembly of molecular building blocks into oriented nanostructure arrays...
Polymer coatings are used extensively as passive masking layers or active materials in diverse field...
The self-assembly of classic diblock copolymers has been known to produce ordered mesophases at the ...
Nanostructures generated from block copolymer self-assembly enable a variety of potential technologi...
Block copolymers (BCPs) self-assemble into periodic arrays of lamella, cylinders, spheres and gyroid...
Self-assembly approaches, e.g. colloidal, emulsion and polymer phase separation, provide scientists ...
Directed self-assembly of block copolymers, based on microphase separation, is a promising strategy ...
Block copolymers (BCP) are self-assembling polymeric materials that have been extensively investigat...
The manufacture of smaller, faster, more efficient microelectronic components is a major scientific ...
Over the course of the past 80 years, semiconductor devices have become increasingly ubiquitous in e...
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineeri...
he directed self-assembly (DSA) of block copolymers (BCPs) is receiving growing attention from integ...
The use of polymers in microelectronics and photonics is continuously developing along two main stre...
Directed self-assembly of block copolymers has received a great deal of research attention as a prom...
Directed Self-Assembly (DSA) is a promising strategy for quickly and cheaply manufacturing nanoscale...
The thin-film directed self-assembly of molecular building blocks into oriented nanostructure arrays...
Polymer coatings are used extensively as passive masking layers or active materials in diverse field...
The self-assembly of classic diblock copolymers has been known to produce ordered mesophases at the ...
Nanostructures generated from block copolymer self-assembly enable a variety of potential technologi...
Block copolymers (BCPs) self-assemble into periodic arrays of lamella, cylinders, spheres and gyroid...
Self-assembly approaches, e.g. colloidal, emulsion and polymer phase separation, provide scientists ...