4F-5 PC-MUT Arrays for Ophthalmologic Ultrasound

Abstract—In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of ophthalmologic ultrasound arrays. Micromachined PMN-PT single crystal 1-3 composites with frequency of ~ 40 MHz were fabricated and characterized with coupling coefficient> 0.71. Linear arrays with frequency of 40 MHz and various pitch sizes (0.5 λ, 1λ and 2 λ) were designed, and the array electrode was patterned using a photolithography based metal etching process. Initial array characterization results show the promising sensitivity and cross talk performance. Keywords-piezoelectric composite; PC-MUT; PMN-PT single crystal; 1-3 composite, ultrasound transducer; micromachining, linear array