ingle-crystal silicon membranes with nanometer thicknesses have mechan-ical properties that can be exploited to produce unique structural and electronic effects. Their mechanical compliance makes membranes fundamentally different from bulk materials or supported thin films.1,2 The growth of nanostressors on ultrathin Si membranes takes advantage of this me-chanical compliance to create a “strain lat-tice ” consisting of very small regions of high local strain in the membrane, the order oc-curring because the local strain provides a strong and precise feedback for self-organization of the nanostressors. Th
This letter reports an efficient and compatible silicon membrane combining the physical properties o...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
Membranes of micrometer lateral sizes and nanometer thickness are nowadays routinely fabricated thro...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
Freestanding, edge-supported silicon nanomembranes are defined by selective underetching of patterne...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
Research on nanomembranes and graphene sheets represents the "third wave" of work on nanomaterials, ...
Ultrathin strained silicon-on-insulator (SSOI) has been in the limelight of device scientists and en...
Mechanical properties of a nanomechanical resonator significantly impact the performance of a resona...
Journal ArticlePseudomorphic three-dimensional Ge nanocrystals (quantum dots) grown on thin silicon-...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
101 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.Following fabrication, membra...
Through a novel methodology for evaluating layer-by-layer residual stresses in epitaxial silicon car...
FUNDAÇÃO DE AMPARO À PESQUISA DO ESTADO DE SÃO PAULO - FAPESPCONSELHO NACIONAL DE DESENVOLVIMENTO CI...
An innovative method to fabricate large area (up to several squared millimeters) ultrathin (100 nm) ...
This letter reports an efficient and compatible silicon membrane combining the physical properties o...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
Membranes of micrometer lateral sizes and nanometer thickness are nowadays routinely fabricated thro...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
Freestanding, edge-supported silicon nanomembranes are defined by selective underetching of patterne...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
Research on nanomembranes and graphene sheets represents the "third wave" of work on nanomaterials, ...
Ultrathin strained silicon-on-insulator (SSOI) has been in the limelight of device scientists and en...
Mechanical properties of a nanomechanical resonator significantly impact the performance of a resona...
Journal ArticlePseudomorphic three-dimensional Ge nanocrystals (quantum dots) grown on thin silicon-...
We report on fabrication and characterization of ultra-thin suspended single crystalline flat silico...
101 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.Following fabrication, membra...
Through a novel methodology for evaluating layer-by-layer residual stresses in epitaxial silicon car...
FUNDAÇÃO DE AMPARO À PESQUISA DO ESTADO DE SÃO PAULO - FAPESPCONSELHO NACIONAL DE DESENVOLVIMENTO CI...
An innovative method to fabricate large area (up to several squared millimeters) ultrathin (100 nm) ...
This letter reports an efficient and compatible silicon membrane combining the physical properties o...
Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecomm...
Membranes of micrometer lateral sizes and nanometer thickness are nowadays routinely fabricated thro...