3D Capacitance Extraction based on Multi-Level Hierarchical Schur Algorithm

Abstract—In this paper, we study the sparse inverse ap-proximation algorithm used in SPACE, the Layout-to-Circuit Extractor. We briefly introduce SPACE and discuss its limitations. Then, we propose some solutions and demonstrate their efficiency and accuracy with some numeric experiments. I. INTRODUCTION TO SPACE Parasitic capacitances of interconnects in integrated circuits has become more important as the feature sizes on the circuits are decreased and the area of the circuit is unchanged or increased. For sub-micron integrated circuits- where th