Highly Stable Surface Functionalization of Microgas Chromatography Columns Using Layer-by-Layer Self-Assembly of Silica Nanoparticles

ABSTRACT: A controllable and high-yield surface function-alization of silicon microchannels using layer-by-layer (LbL) self-assembly of SiO2 nanoparticles (SNPs) is presented. The application of SNPs (45 nm average diameter) coating as a stationary phase for chromatographic separation is also demonstrated with surface functionalization using chloroalkyl-silanes. This method facilitates a simple, low-cost, and parallel processing scheme that also provides homogeneous and stable nanoparticle-based stationary phases with ease of control over the coating thickness. The SNP-functionalized microfabricated columns with either single capillary channels (1 m long, 150 μm wide, 240 μm deep) or very narrow multicapillary channels (25 cm long, 30 μm wide, 240 μm deep, 16 parallel channels) successfully separated a multicomponent gas mixture with a wide range of boiling points with high reproducibility. Because of recent advancements and the emergence ofmicroelectromechanical systems (MEMS), energy-efficien