Invited paper Integrated gas chromatograph

Abstract|A portable gas chromatograph with integrated micromachined ushed injector and thermal mass detector (TCD) has been developed. The silicon/glass injector operates in a xed volume (27 µL) or electronically operated mode. An integrated, pneumatically operated, fast cross-valve is ap-plied in the injector. The TCD detector consists of two Pt microheaters and thermoresistors packaged in a silicon/glass micromachined chip. The temperature of two capillary molec-ular sieve separation columns is controlled by a thick-lm heater fabricated on polyimide foil. The chromatograph is equipped with two 16-bits microprocessors communicating with the external portable PC. The instrument may operate in the on-line continuous analysis mode. Keywords|portable gas chromatograph, integrated injectors, silicon micromechanics. 1