Pyroelectric PNZT Infrared Detectors

Numerous studies have been carried out on the fabrication of ferroelectric lead titanate (PT) and lead zirconate titanate (PZT) thin films and their applications to pyroelectric sensors [1–3]. Not many efforts have been made to integrate the films with silicon technology. In this article, we report on the growth of lead-zirconium-titanates films doped with niobium (PNZT) by a sol-gel method on platinized Si substrates along with its characteristics for use in infrared sensor applications