A high-speed low-voltage stressinduced micromachined 2 2 optical switch

Abstract—A low-voltage electrostatically actuated 2 2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror dis-placement (300 m) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 s), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved. Index Terms—MEMS, micromachined fiber optic switch, opti-cal switch, stress. I