Micro-machined three-dimensional micro-optics for integrated free-space optical system

Abstract- Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining tech-nology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely hold at 90 " angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench " on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are con-structed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging. I