A (2010) Integrated Maintenance Scheduling for Semiconductor Manufacturing

We present a maintenance scheduling problem arising from semi-conductor manufacturing which is characterized by low resource contention and multiple complex objectives and preferences. Since semi-conductor manufacturing involves a very high degree of uncertainty at the level of detailed op-erations, such as machine availability, yield, and processing times, generating a maintenance schedule which takes into account production operations is a challenging problem. We have developed an integrated approach, with respect to pro-duction operations, which uses simulation to estimate ex-pected levels of work in process in the fab. We present details of our solution approach which is based on goal program-ming, constraint programming and mixed-integer program-ming