A STUDY OF WHY ELECTROSTATIC ACTUATION IS PREFERRED AND A SIMULATION OF AN ELECTROSTATICALLY ACTUATED CANTILEVER BEAM FOR MEMS APPLICATIONS

One of the most common applications of MEMS is by utilizing them as microsensors and microactuators. They have become varied in their applications and can be found almost everywhere in everyday life. The popularity of these microsensors and microactuators is mostly due to the great advantages that they posses. In addition to their small size, MEMS sensors and microactuators consume very little power and are capable of delivering accurate measurements, which are unparalleled with macro-sized sensors. Hence in this research a comparison of some common actuation mechnisms is done and the results showed why electrostatic actuation is gaining roots in recent advancements of micro devices due to its enormous advantages including fast response time and ease of integration and fabrication. Also an electrostatically actuated cantiliver beam was simulated to see the relationships between applied voltage against displacement and also applied voltage against capacitance. This simulation results can be used for many MEMS applications especially in the design of RF switches