Design and Analysis of a 2-DOF Compliant Mechanism for Nano Scale Positioning

Copyright © 2015 ISSR Journals. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. ABSTRACT: The paper investigates the design process and the analysis of a two degree of freedom compliant mechanism for nano scale positioning applications. In this research, the flexure based mechanism possesses a decoupled characteristic in x-and y motions and compact structure in size. Moreover, the mechanism’s workspace will be amplified via using a lever amplification mechanism. In order to achieve an optimal size, a multiple objective optimization based on response surface method and kigring regression model are carried out. Besides, the effect of design variables on each of the output response of the proposed mechanism will analyzed as well. The proposed 2-DOF compliant mechanism size of 186 mm 186 mm possessed the workspace of 130 μm 130 μm in the x-and y axes. The confirmation experiment using a simulation in ANSYS revealed that the error between the predicted result and the actual value was about 1.6%. It means that there is a good agreement between two results. It is also clear that the proposed mechanism has much lower error than that of previous studies in the literature review. Ultimately, the proposed mechanism is expected to further applications in practice positioning and manipulator systems